MEMS and NEMS - micro (and nano) electromechanical systems
نویسندگان
چکیده
MEMS and NEMS use application is growing their market expanding. With the development of 5G IoT technologies number components always increasing. In this paper an introduction to MEMS/NEMS definition, categories, advantages. Fabrication techniques are discussed. Finally, elaborative analysis different applications MEMS/NEMS, followed by a discussion future Micro / Nano electromechanical Systems.
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ژورنال
عنوان ژورنال: Advances in Computing and Engineering
سال: 2022
ISSN: ['2735-5977', '2735-5985']
DOI: https://doi.org/10.21622/480